| Remarkably enhanced plasma resistance of Y2O3-and Y-rich thin films through controllable reactive sputtering | |
|---|---|
| Year | 2025 |
| Journal | Appl. Surf. Sci. |
| Author | Hae-Seong Jang, Kang-Bin Bae, Se-Rin Min, Yoon-Suk Oh, In-Hwan Lee*, Sung-Min Lee |
IF: 6.3 (JCR Top 10.9%) https://doi.org/10.1016/j.apsusc.2024.162050 Publication date: 15 Mar 2025 |
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