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Plasma-enhanced atomic layer deposition of MgO thin films with superior fluorine plasma resistance
Year 2026
Journal Appl. Surf. Sci.
Author Seungri Kim, Hae-Seong Jang, Changui Ahn, Yoon-Suk Oh, In-Hwan Lee*, Sung-Min Lee
Link 관련링크 https://doi.org/10.1016/j.apsusc.2026.167215 87회 연결

IF: 6.9 (JCR Top 10.4%)

https://doi.org/10.1016/j.apsusc.2026.167215

Publication date: 30 September 2026