Publication Laboratory for Optoelectronic Materials

Journal
  • Publication
  • Journal
Cerium(IV) oxide addition to yttrium oxide thin films for enhanced etch resistance in fluorine-based plasma
Year 2026
Journal Ceram. Int.
Author Kang-Bin Bae, Hae-Seong Jang, Se-Rin Min, Seungri Kim, Yoon-Suk Oh, Jung-Kyun Na, In-Hwan Lee*, Sung-Min Lee
Link 관련링크 https://doi.org/10.1016/j.ceramint.2026.03.225 34회 연결

IF: 5.6 (JCR Top 7.4%)

https://doi.org/10.1016/j.ceramint.2026.03.225

Publication date: 16 Mar 2026